Abstract: The Sum of Coherence System (SOCS) algorithm is commonly used to calculate the aerial images of partially coherent systems in the lithography simulation. However, computing the kernels of ...
Abstract: To explore the anisotropic nature and improve computational efficiency, eigenvalue (EV-) analysis is adopted to implement the transfer matrix method (TMM), abbreviated as EV-TMM, enabling ...
All authors are with the Department of Mechanical Engineering at Louisiana State University, Baton Rouge, Louisiana, United States of America. For brevity, we have divided this README into the ...
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