Abstract: This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer that uses the principle of Fabry–Pérot (F-P) interference in conjunction with a micromechanical ...
Abstract: In our work, an optical MEMS accelerometer based on wavelength modulation is proposed, using a double nanoscale distributed Bragg reflector (nano-DBR) structure. In view of its specific ...